PF2x5.eng

Caution: 36 to 38 Nm Rc(NPT)1 45 mm PF2W511 Sensor Monitor PF22 Mounting and Installation Wiring WARNING indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Black Warning: 1 Main circuit + Installation Brown DC(+) Connections should only be made with the power supply turned off.

Digital Flow Switch (Remote type sensor unit)

Nominal thread size Required torque Rc(NPT)3/8 22 to 24 Nm Rc(NPT)1/2 28 to 30 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm Model Width across flats of attachment PF2W504 34 mm PF2W520 PF2W540 PF2W511 45 mm PF2W504T 34 mm PF2W520T PF2W540T -16No.PF-OMO0014-D Wiring Connections should only be made with the power supply turned off.

Digital Flow Switch (Remote type sensor unit)

White, Black, Blue Insulator Outside diameter approx. 0.9 mm Nominal cross section area approx. 0.15 mm2 Conductor Outside diameter approx. 0.5 mm -18No.PF-OMG0006-F Material of parts in contact with fluid and fluids compatibility checklist Fluid Condition Compatibility Acetone Ammonium hydroxide concentration 30% or less Isobutyl alcohol x Isopropyl alcohol Hydrochloric acid concentration 38%

PF2D5.eng

Black Output for PF2D3 Isopropyl alcohol Brown DC(+) concentration 38% or less Hydrochloric acid If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system Check the product regularly for proper operation Otherwise malfunction can result, causing an accident.

PF3W7x.eng

Rc(NPT)1 36 to 38 Nm Without temperature sensor/without unit selection function 3. Press the SET button to finish the setting. Rc(NPT)11/4 40 to 42 Nm [ oUt2] Output mode (OUT2) [ HYS] Hysteresis mode Element Description Rc(NPT)11/2 48 to 50 Nm [ 2ot] Switch operation (OUT2) [ 2_P] Normal output The switch turns on within a set flow range (from P1L to P1H) during window comparator mode.

Digital Flow Switch (Manifold type)

Nominal thread size Tightening torque Rc(NPT)3/8 15 to 20 Nm Rc(NPT)1/2 20 to 25 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm If the tightening torque is exceeded, the product can be broken. If the correct tightening torque is not applied, the fittings may become loose. Avoid any sealing tape getting inside the piping.

PF3WBCSR.eng

Rc(NPT)1/2 20 to 25 Nm Specifications Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm After maintenance is complete, perform appropriate functional inspections and leak tests. Stop operation if the equipment does not function properly or there is a leakage of fluid. When leakage occurs from parts other than the piping, the product might be faulty.

PF3W7.eng

Rc(NPT)1 36 to 38 Nm Other parameter settings If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation. Otherwise malfunction can result, causing an accident. Set value P_1 Installation Use the product within the specified operating pressure range and temperature range.

PF3W5.eng

They are all important notes for safety and must be followed in addition to International standards (ISO/IEC) and other safety regulations. 4 Analogue output (flow rate) Rc(NPT)3/4 28 to 30 Nm Pin number of the connector at the body side Rc(NPT)1 36 to 38 Nm Maintenance Rc(NPT)11/4 40 to 42 Nm Element Description Rc(NPT)11/2 48 to 50 Nm How to reset the product after a power cut or when the

Digital Flow Switch (Remote type monitor unit)

Input of set values P2dH P2AH n2AH P2AL n2AL Setting of P2L/n2L P2H/n2H Setting of tnL/tPL Setting of P_2/n_2 Setting of tn/tP n2dH P2dL n2dL tnH/tPH H_2 H_t H2 Ht (Page 37) (Page 39) (Page 37) (Page 39) (Page 38) 4. Completed [F 2] Setting of OUT2 is completed. -35No.PF-OMN0012-H 1.

PF3W7x-X445.eng

[F30] Storing of accumulated flow OFF [not held] Rc(NPT)1 36 to 38 Nm System error Turn the power off and turn it on again. If the failure cannot be solved, contact SMC for repair. [F80] Setting of power saving mode No setting [display is turned on] Rc(NPT)11/4 40 to 42 Nm Switch ON Switch OFF Do not touch the terminals and connectors while the power is on.

Process Pump

Description PA5010 Diaphragm kit KT-PA5-831 Check valve kit KT-PA5-836 Switching valve parts kit KT-PA5-37 Pilot valve kit KT-PA5-38 Manual cap assembly kit KT-PA5-45 14 Piping and Operation Caution Mounting posture of the pump is set with the mounting foot facing downward. Air to be supplied to the air supply port should be cleaned and filtered through AF filter, etc.

Process Pump

Description PAX112 Diaphragm kit KT-PAX1-31 Check valve kit KT-PAX1-36 Switching valve parts kit KT-PAX1-37#1 Pilot valve kit KT-PA5-38 Pulsation attenuator control valve kit KT-PAX1-39 Piping and Operation Caution Mount the pump so that the reset button faces upward. Air to be supplied to the air supply port should be cleaned and filtered through AF filter, etc.

High Vacuum L Type Valve

part) 2 5 Body (Material: A6063) Valve (Material: SUS304) 6 Valve seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38

XL-OMY0001

1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38

XLA- ∗ -F7NJ ∗ - ∗ Series

(Option) Thermal resistance magnet (for auto switch) Pilot port 7 Heater (Option) Bellows holder (Material: SUS304) External seal (Maintenance part) 3 6 Bellows (Material: SUS316L) 5 Valve (Material: SUS304) 2 Valve seal (Maintenance part) C D J 4 C E E Body (Material: A6063) (KF flange) (K flange) Fd fn Heater (Option) Auto switch (Option) G H B A A Unit: mm Model n Fd XLA-16 40 103 38

High Vacuum L Type Valve

Construction and Outer dimensions Indicator Handle Ass'y(Maintenance part) (Including ,,,) 1 Bellows holder (Material: SUS304) 7 Heater(option) Exterior seal (Maintenance part) 3 Bellows (Material: SUS316L) Valve (Material: SUS304) 6 5 Valve seal (Maintenance part) 2 Body (Material: A6063) 4 D C E E F C H B G A A Unit: mm Model H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41

XL-OMY0003

. <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) < SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5

Industrial Filter

Tension bolt Table 3 Guideline of the wing nut tightening amount Model FGES L A FGES L B FGES L C Element size (mm) 65 to 70 250 65 to 70 500 65 to 70 250 65 to 70 750 65 to 70 250 Wing nut tightening amount 26 to 30 40 to 45 33 to 38 51 to 55 27 to 44 Wing nut tightening amount (mm) 11/12 FGX-OM-L008-A 5-4 [Mount O-ring and cover] (1) Set O-ring to the case (2) Rotate the cover clockwise

K35-OMW0030

When the setting of the set point is completed and the calibration signal is turned OFF, the operation mode will change to the target position operation. 38 DIP switch No. 1 setting OFF ON Movement direction Standard Reversed Retracted end Retracted end 4 mA 20 mA Set point Set point 20 mA 4 mA (Stop position) Relationship between the piston rod position (between the retracted end and set