ZX

(mm) ZCU 24 VDC 24 VDC Supply voltage AMJ Suction filter unit ZX1-F Operating pressure range Vacuum to 0.5 MPa Misc. 30 m Filtration Air supply port M5 (Standard)/M6 (Option) Unit Manifold Vacuum pad connection port M5 (Standard)/M6 (Option) Air supply port Rc 1 8 Common specifications Exhaust port Rc 1 8 External pilot port M5 Stations Max. 8 units Refer to pages 13-2-8 to 13-2-18 for more

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

1/4, 3/8 200 Width across flats 3 x Rc 1/4, 3/8 Width across flats 3 x 4.5 mounting hole DIN terminal (D) Conduit terminal (T) Applicable cable O.D. 6 to 12 Manual override (Non-locking) Manual override (Non-locking) Connector 2 x mounting groove 2 x mounting groove Width across flats 3 x Rc 1/4, 3/8 3 x Rc 1/4, 3/8 Width across flats VV061 With locking manual override Conduit terminal with

ML2B

1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 ND 5.6 6.8 8.6 MB M6 x 1 M8 x 1.25 M10 x 1.5 LL 28 30.5 37.5 PB Rc 1/16 Rc 1/16 Rc 1/8 OO 9 10 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 LA 11 12 14 Model ML2B25 ML2B32 ML2B40 10-13-14 12 Stroke Reading Rodless Cylinder with Brake Series ML2B With stroke sensor: With brake: ML2B Bore size S Stroke ML2B Bore size B Stroke N K M 9 N K M 1 RE A

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP AG AB A AA AN B GD AH AI AJ AK AL AM AO AP BZ GC Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30

RLQ

T3 Cylinder with Bypass Piping Component Parts T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 T1 81.4 93.3 99.8 No. 1 2 3 4 Description Qty. 1 1 1 1 Part no.

Fieldbus System

, G, NPT/NPTF) 3/4 [3(R) port] 1/2: 1/2" female thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 56.6 30 101.2 15.7 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 11.5 72 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8, C8, C10,

HRS100/150

F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) HRSE Note) This is a manual fluid fill port that is different from the automatic fluid fill port.

energy saving effect

F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) When multiple options are combined, indicate symbols in alphabetical order.

ML2B

1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 MB M6 x 1 M8 x 1.25 M10 x 1.5 ND 5.6 6.8 8.6 LL 28 30.5 37.5 PB Rc 1/16 Rc 1/16 Rc 1/8 OO 9 10 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 LA 11 12 14 Model ML2B25 ML2B32 ML2B40 10-13-14 12 Stroke Reading Rodless Cylinder with Brake Series ML2B With stroke sensor: With brake: ML2B Bore size S Stroke ML2B Bore size B Stroke N K M 9 N K M 1 RE A

Transfer

1/8 Rc 1/8 Rc 1/4 PB Rc 1/16 Rc 1/16 Rc 1/8 Model ML2B25 ML2B32 ML2B40 716 Stroke Reading Rodless Cylinder with Brake ML2B Series With stroke sensor: With brake: ML2B Bore size S Stroke ML2B Bore size B Stroke CEP1 N K M 9 N K M O H 1 CE1 O 1 H CE2 PP ML2B ML2B NN NN MM MM KK LL KK LL 2 x PA (Port for operating cylinder) J I J 2 x PA (Port for operating cylinder) F F F 76.5 91 110 H 73 88

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP A AA AB AG AH AI AJ AK AL AM AN AO AP B BZ GC GD Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 11 13 75 32 28 54 134 150 108 140 M 8 135 110 4 9 9 104 86.5 15 16 88 37 29 62 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 15 16 88 37 30 62

MLGC

Note 3) Common with cushion ring gasket A except for standard stroke of 20 and 25. 3.2-6 Fine Lock Cylinder with Guide Series MLGC Basic/With Rear Plate MLGClBl-l-R-l CL MLGC CNA CB CV/MVG CXW CXS CXT MX MXU MXS MXQ MXF Standard Stroke Stroke range (mm) AC AB AF B E AD A Bore size (mm) AA AE AP BP BZ C D F G GC MXW Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 20 25 32 40 75, 100, 125, 150, 200

Cylinder with Lock Series CLS

Seal kits are sets consisting of items 60, 62, 63, 64, 65 and 67, which can be ordered using the order number for each cylinder bore size. 4 Series CLS Dimensions Basic type/(B) BC FREE LOCK CLS125 MODEL SMC CHECK Cylinder With$ Locking Mechanism Rc(PT) 1/4 Unlocking port (unlocked when pressurized) GC BA BB Plug with breathing hole 2-Rc(PT) P 4-J M GA GA Width across flats KA MM BZ GB 90

Compact Cylinder with Air Cushion and Lock Series RLQ

Rod side cylinder port Rc, NPT, G 1/8 Rear cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 Rear cylinder port Rc, NPT, G 1/8 Rod side cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 w e r t q u i y w e r t q u i y Approx. Max. 77.4 Approx. Max. 77.4 Approx. 53.8 Approx. Max. 59.4 Approx.

Thermo-chiller

F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Note 1) 400 V type is provided with an earth leakage breaker (-B) as standard.

VXD21/22/23

LQ Hexagon width across flats Bracket 2-Rc , , 4 1 8 3 2 1 LVN TI/ TIL Conduit terminal: T PA PAX PB Bracket 2-Rc , , 4 1 8 3 2 1 : Port size Rc 1/2 17-3-39 8 The VX series will be revised shortly.

Tie-rod Type Hydraulic Cylinder

10 Tie-rod washer Steel wire 11 Piston nut Rolled steel 12 Needle valve nut Carbon steel 13 Tie-rod nut Carbon steel 14 Air release valve Alloy steel 15 Check ball Bearing steel 16 Wear ring Resin 17 Cushion seal 18 Wiper ring NBR 19 Rod seal NBR 20 Piston seal NBR 21 Needle valve seal NBR 22 Cylinder tube gasket NBR 23 Piston gasket NBR 399 CHA Series Dimensions Basic type: CHAB V 2 x Rc

CV/MVGQ

Solenoid valve #1 Double (3) How to order solenoid valves Note 1) V3108-00 Voltage Electrical entry Note 2) V3108-00 Voltage Electrical entry x 23 Note 3) V3208-00 Voltage Electrical entry For the dimensions of DIN terminal, refer to page 10-15-59. 10-15-55 56 Series CV3 Basic Style: CV3B Lube type (CV3B), Non-lube type (CV3BN) Throttle valve With rod boot 24 11.4 12 RC 1/4 EXH RC 1/4 SUP

VXA31/32

PA All common ports are Rc 1/4.