Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

7 8 12 13 22 25 36 40 44 48 85 89 6 7 12 9 12 18 16 24 22 25 36 40 52 93 106 38 39.2 40.7 40.7 44.8 53.2 59.8 59 64.4 71.6 76 77.7 82.1 4.5 5.2 6.2 5.2 6.3 6.7 8.1 7.4 8.2 9.8 11 38 39.2 48.7 40.7 40.7 50 52.2 52.2 54.4 59.8 59 64.4 70.8 76.9 83.1 8.4 9.3 11.6 9.3 11.6 12.8 15.2 12.8 15.2 18.5 20.9 18.5 20.9 4.5 5.2 3.2 4 6 4 6 6 8 6 8 10 12 10 12 1/8" 5/32" 3/16" 1/4" 5/32" 3/16" 1/4" 3/

Fieldbus system Ethernet POWERLINK compatible SI unit

Unit parameter is set to Via software. 39 EX## OMS1015-A 6.

EX600-DX_DY_DM_eng

EX600-DM E EX600-DM F EX600-DY B EX600-DY E EX600-DY F EX600-DX B EX600-DX C EX600-DX D EX600-DX E EX600-DX F 1 1 2 1 1 Description Function 6 6 6 6 2 3 2 3 Displays the status of the unit. 2 2 5 5 5 5 3 3 4 4 1 1 2 1 1 6 6 6 6 2 3 2 3 2 3 5 5 5 5 3 4 4 Valve plate mounting groove 1 1 6 6 Valve plate (EX600-ZMV ) 1 5 2 2 3 5 5 3 Direct mounting (1)When joining six or more units, fix the middle

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

( Up to 7% reduction in square area installation Up to 35% reduction in cubic area installation ( Wide variety of manifold option Accommodates enclosure IP65 Dust/Splashproof type 3-11-1 2 ISO Standard Solenoid Valve Size 1, 2, 3/Single Unit Series EVS7-6/7-8/7-10 How to Order S 3 EVS7 6 FG M0 Valve Size 6 8 10 Thread type Size 1 Nil F T Rc Size 2 G Size 3 NPTF Passage symbol Courtesy of

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

6 r t !3 w q e !5 !0 !1 !

Air Slide Table Series MXQ

Applicable cylinder bore size Metal stopper 6 8 12 16 20 25 6 8 12 16 20 25 3 Air Slide Table Series MXQ Shock Absorber Specifications Table Accuracy RB0805 RB0806 RB1007 RB1411 RB1412 Shock absorber model MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 B C Applicable slide table Radial internal clearance 19.6 14.7 5.88 2.94 0.98 Max. absorbed energy J 12 11 7 6 5 Stroke absorption mm M 50 to 500 Max. impact

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

A, B port specifications P, R port A, B port Port size M3 0.5 M5 0.8,N3T ( one touch fitting) SYJ3 23 0.9 (0.05) __ 1.2(0.067) Effective area Note 1) mm2(Cv) SYJ3 33 Socket : 26 poles MIL type with strain relief conforms to MIL-C-83503 Connector Internal wiring Note 2) Both for +COM and COM SYJ3 23 5 6 LOU -M3 SYJ3 33 5 6 LOU Applicable solenoid valve Rated voltage 24VDC,12VDC Note 1) Value

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 13 140 18.5 39 51.5 118 136.5 5 12.5 20 22 40 43 13 13 137 15.5 36 50 115 13 133.5 12.5 52.5 50 48.5 ZPT25F10-0-A14 ZPT50F10-0-A14 141 19.5 40 119 137.5 6 13.5 25 28 50 53 ZPT32F10-0-A14 135.5 16 36.5 115.5 134 13 32 35 49 Additional dimensions by stroke(mm) Additional dimensions by stroke(mm) K P Q: 6 Q: 8 K

2/3 Port Valve

Applicable fluids TL D DIN connector DIN connector with indicator light DL 6, 7, 9.

Compact and Lightweight

Model 6 6 6 ZH05DA ZH07DA 1/4" 1/4" 1/4" ZH05DA ZH07DA One-touch One-touch SUP. EXH. 6 6 8 ZH10DA 1/4" 1/4" 5/16" ZH10DA 8 10 10 ZH13DA ZH15DA 5/16" 3/8" 3/8" ZH13DA ZH15DA 10 12 12 ZH18DA ZH20DA 3/8" 1/2" 1/2" ZH18DA ZH20DA One-touch Oval release button is only available with 6. VAC. One-touch and screw-in connection SUP. VAC. EXH. Model SUP. VAC. EXH.

energy saving effect

HRSH 090 6 Signal for the completion of preparation A signal is output when the circulating fluid temperature reaches the set temperature, when using contact input/output and serial communication. !0 !1 !2 !3 !4 !5 !6 HRSH HRSH No.

MIW/MIS

25 MB MA HC HE KB KA LA LB LC PA PB PD PC ME MD MIS12-10 MC HD HA, HB JB JA N Model 48 38 28 39 29 19 MIS12-30 MIS12-20 13 10 7 6 4 3.5 17.5 11.6 2.3 M2.6 x 0.45 19 4 M4 x 0.7 6 11 5 2.5H9 0 +0.025 18 6 MIS20-30 MIS20-20 MIS20-10 7 40.5 30.5 20.5 52 42 32 8.5 17.5 4H9 0 +0.030 5 5 2.8 M3 x 0.5 26 6 M6 x 1 9 25 12 8 10 15 14 26 10 Series MIW/MIS Finger options Tapped on upper and lower faces

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

Action D S Rod end threads Double acting Single acting (spring extended) Rod end female threads (4 without threads) Rod end male threads Nil M Table 2 Auto switch specifications Table 1 Standard strokes Action Bore size (mm) 4 6 8, 10 4 6 8, 10 Standard stroke (mm) 4, 6, 8, 10 4, 6, 8, 10, 15 4, 6, 8, 10, 15, 20 4, 6 4, 6, 8 4, 6, 8, 10 Load voltage Lead wire length (m) Indicator light Wiring

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Q = D __ 4 6 _ 1000 Q = (D d) __ 4 6 _ 1000 Formula (1) .

AC Servo Motor Driver (Pulse input type)

Lists the history (Maximum 6 cases) of alarms that occurred in the past.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(n 2) (n = 4, 6) Note 4) Rail mounting D-A7mH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-A79W 10 15 10 + 15 (n 2) (n = 4, 6) Note 4) D-F7m D-J79 5 5 15 + 15 (n 2) (n = 4, 6) Note 4) D-F7mV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-F7mW/J79W D-F7BA/F79F/F7NT 10 15 15 + 20 (n 2) (n = 4, 6) Note 4) D-F7mWV D-F7BAV 10 15 10 + 15 (n 2) (n = 4, 6) Note 4)

E-P HYREG

0.7 MPa) Note 6) The supply pressure must be under the maximum operating pressure.

Aluminum High Vacuum Angle Valve

DBellows seal P.448 to P.453 10-6 to atmospheric pressure Single acting (N.C.) 10-10 10-11 XSA XLDV (With solenoid valves) O-ring seal Prevents a pump from running overloaded. XVD Standard XGT XLH CYV 10-6 to atmospheric pressure P.454 P.455 Particle free cleaned Bellows seal 10-10 10-11 Standard Standard Manual (Size 16: None) XLS P.456 to P.458 Single acting (N.C.)

Non-contact Gripper

P PL M ML C H D L XT661-4C-X321 M5 x 0.8 5 M4 x 0.7 8 32 6 39 XT661-6C-X321 M5 x 0.8 6 M4 x 0.7 6 47 11 59 XT661-8C-X321 M5 x 0.8 6 M4 x 0.7 6 47 17 79 XT661-10C-X321 Rc 1/8 M4 x 0.7 6 47 23 99 XT661-120E-X322 Rc 1/8 M5 x 0.8 7 72 30.5 120 XT661-150E-X322 Rc 1/8 M5 x 0.8 7 72 37.5 150 744 Non-contact Gripper XT661 Series Dimensions [Bernoulli Type] With guide assembly Size: 120 Size

Ionizer Nozzle type IZN10 Series IZS

Pressure gauge 6 Union tee fitting Flow meter O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) Ionizer Fig. 1: Flow rate characteristics measuring circuit 446 Technical Data IZN10 Series Ozone Concentration (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 0.03 IZS IZN IZN IZF Ionizer ZVB 0.02 Concentration [ppm] Energy saving static neutralization nozzle/