MHF2

4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x 0.5 17 18 0.8 18 0.8 Finger closing port M3 x 0.5 4-4.5 +0.1 0 Finger opening port Close: 0 E-E Open: 321 Use the attached hexagon socket head screws for mounting holes. 8-M2.5 x 0.45 thread depth 3 Attachment mounting thread 4-M3

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

6E 8E 11E 4 6 A C L IDFS M R Model Air compressor Refrigerant Voltage R134a 5.5kW 7.5kW 11kW 6E 8E 11E Single phase, 240VAC (50Hz) Single phase, 220VAC (50Hz) 4 6 Option A C L R M With anti corrosive treatment With heavy duty auto drain With circuit breaker With motor operated auto drain With cool compressed air Model IDUF6E IDUF8E IDUF11E Note 1) All the options are not currently available

Low Differential Pressure Sensor

Connector no. 1 2 3 4 Wire core color Air tubing For PSE300 (ZS-28-C) Brown (DC(+)) Not connected Blue (DC(-)) Black (OUT: 1 to 5 V) Resin pipe Part-A 1 2 3 4 Controller Handling Warning 1 2 3 4 1. Do not drop, bump, or apply excessive impact (100 m/s2) while handling.

Series VCL

3 (0.12) 6.3 (0.35) 0.8 (116) 4 (0.16) 9.7 (0.54) 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 (0.93) 3/8: 0.40 (0.88) 1/2: 0.49 (1.08) 2.0 (290) 3 VCL3 0.5 (72) 5 (0.20) 14.4 (0.80) 0.2 (29) 7 (0.28) 24.8 (1.38) 0.1 (14) 10 (0.39) 37.8 (2.10) 2.0 (290) 3 (0.12) 6.3 (0.35) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4: 0.58 (1.28) 3/8: 0.55 (1.21) 1/2: 0.62 (1.37) 3/4: 0.78 (1.72) 1.1 (159) 4 (0.16

VXR21/22/23

74 (81) 88 (98) 90 (100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80 (90) 82 (92) Normally open Normally closed VXR215006 04 06 04 VXR2152, 1 1 VXR2262-10 VXR2272-12 80 90 125 101 (112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5

VCB

(8A) 3.0 1/8: 0.21 1/4: 0.24 2 VCB2 0.5 9.2 (0.51) 4 0.3 11.7 (0.65) 5 2.0 6.3 (0.35) 3 0.8 9.7 (0.54) 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 3/8: 0.40 1/2: 0.49 3 VCB3 0.5 14.4 (0.80) 5 3.0 0.2 24.8 (1.38) 7 0.1 37.8 (2.10) 10 3.0 6.3 (0.35) 3 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4: 0.58 3/8: 0.55 1/2: 0.62 3/4: 0.78 1.3 10.8 (0.60) 4 0.7 15.3 (0.85) 5 3.0 4 VCB4 0.3 24.8 (1.38) 7

VCL

Max.operating pressure differential (MPa) Port size Flow characteristics Max.system pressure (MPa) Orifice size (mm) Weight (kg) Class Model PAX Cv converted Av x 10 -6(m 2) 2 0.16 3.8 1.5 PB 3 0.33 7.9 0.8 1/8 (6A) 1/4 (8A) 1/8 : 0.21 1/4 : 0.24 2 VCL2 2.0 4 0.51 12 0.4 5 0.65 16 0.25 3 0.35 8.4 1.5 4 0.54 13 0.8 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4 : 0.42 3/8 : 0.40 1/2 : 0.49 VCL3 3 5 0.80

RS2H-OM0045P

P(MPa) 4. 1. :200(Kg) 2. :20(m/min) 3. :0.5(MPa) 4. :0.1 D 50 : : mmax 1 RS2H mmax : mmax (Kg) =0.1 =0.2 NO 50 400 280 mAm max 63 530 365 YES 80 800 565 V m mmax=0.1 200<400 mP6 -1-* -1-1V=20m/minm=278(Kg) 200278 NO mA m YES FA=mAg FA 2000.19.8 196(N) FAmAg(N) (g: :9.8m/S 2) P F -2-1P=0.5(MPaF=766(N)766(N) 196776 P7 -2-1 NO FA F RS2H50 YES v [m/min] m [kg] -1 5 - -

0.01

Rc 1/4, G 1/4 NPT 1/4 Rc 1/4, G 1/4 NPT 1/4 Female thread Rc 1/4, G 1/4, NPT 1/4 Resin Case material Resin Aluminum Stainless steel Air (Nitrogen) Fluid 0.01 m (filtration efficiency: 99.99%) Note) Nominal filtration rating Initial pressure drop 0.03 MPa (at inlet pressure 0.7 MPa, maximum flow) Maximum operating pressure (at 20C) 1.0 MPa (in case of nitrogen: 0.99 MPa) 5 to 45C Operating

Cylinder

Pin Cylinder Index Double Acting With Auto SwItch Single Acting SIVC I Double Acting Series CJP/6, 10, 15 Specifications Double acting Action CJPB1S-300 7kgf/ cm' Max. oper~ting pressure 1.2kgf/cm' ~ 6' M in,-operati':l9 pr~ss,ure, '4>10,'4>15 0.6kgf/cm' Ploof p" reSsLire 10.5kgf!

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Air preparation filter

Dimensions H Bracket K L N M D Auto drain (MAX1.6MPa) C I Bracket (accessory) () P E A F J B 1/4 1/4 female Maintenance G OUT IN Drain space Drain guide A A 3/8 female 3/8 G Maintenance Drain space Thread type Rc, G: 10 NPT: 3/8 Rc,G10 NPT3/8" Maintenance space Drain G Auto drain (MAX1.0MPa) Auto drain (MAX1.6MPa) Drain guide B C D E F G Model Port size A AFF,AM,AMD 70D 11 1/2

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

Theoretical Output (N) Operating pressure (MPa) Rod diameter (mm) Piston area (mm) Operating direction Model 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.15 39.2 33.6 28.0 22.4 16.8 8.4 11.2 56 OUT M L 4 CXS 6 21.7 18.6 15.5 12.4 9.3 4.6 6.2 31 IN 110 94.2 78.5 62.8 47.1 31.4 157 OUT 15.7 M L 6 CXS 10 70.0 60.0 50.0 40.0 30.0 20.0 100 IN 10.0 247 212 177 141 106 70.6 353 OUT 35.3 M L 8 CXS 15 176 151

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

(PA port) [External pilot specification] Lead wire length 200 mm Manual override 1/4 (PE port) 11/4" (EXH port) NO NC 2 8.5 2 x 8.5 (For mounting) PA PE (Mounting hole) 163.3 26 108 108 75 68 OUT IN EXH 45 45 17 36 82.6 2 x 3/4, 1, 1 1/4 (IN, OUT port) 95 Note) External pilot port (PA port) 1/4 is processed for threads in external pilot model only.

3 Position Cylinder Series RZQ

K E Z a a L B + Full stroke M K A + Full stroke J E 4-O1 effective thread depth RB RA W 4-O1 T Section a-a Standard type (Through hole type)/RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b Section b-b (mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0

Parallel Type Air Gripper Series MHZ

4 4 4 4 4 Double acting 3.3 (0.74) 6.1 (1.37) Normally open 1.9 (0.43) Single acting Normally closed 3.7 (0.83) Single acting type, normally open Note 1) Values based on pressure of 0.5MPa, gripping point L = 20mm, at center of stroke.

EXxx-OML0010CN

a) (52) b) 28 c) (52) c) (16) e) (16) f) (/) g) () h) () i) j) k) l) m) -19No.EX-OML0010CN-C 4.

3 Port Solenoid Valve

A01 A02 3.18/2 Barb fittings (6/4) Barb fittings 4/2.5 Note) The outside and inside diameters of the applicable tubing are indicated for the barb fitting.

XM, XY

Standard lead wire length is 0.5 m. Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Ex.)

Coolant Valve

2 3 4 6 5 0 1 2 3 4 5 Flow velocity (m/s) Flow velocity (m/s) Calculating the Flow Velocity v = 21.2 x Q/d2 (Symbol) v: flow velocity (m/s) Q: flow rate (L/min) d: piping inner diameter (mm) 626