Stations: 12 Stations, Port Size: N7 (ø1/4" One-touch Fitting), S Kit: SKA (IO-Link - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: D (DIN Rail), DIN Rail Length: 13 Stations (for 13 Stations; Longer Rail than Total Length of Specified Valve Stations), Option 2: NS (N + S)

Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 12 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: Internal Pilot, P,E Port Size: ø12, Mounting: D (DIN Rail Mounting, w/DIN Rail), DIN Rail Option: 13 (for 13 Stations; Longer Rail

Lateral vacuum inlet with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, Lateral Vacuum Inlet, w/buffer, VACUUM PAD, ZP, ZP2, ZP3, M30, 13 lb

Stations: 12 Stations, Port Size: ø4 One-touch Fitting, S Kit: EtherNet/IPâ„¢ - 32 Outputs - Connector M12, SI Unit Polarity: Negative Common, Option 1: DIN Rail, DIN Rail Length: 13 Stations (for 13 Stations; Longer Rail than Total Length of Specified Valve Stations), Option 2: External Pilot

Stations: 12 Stations, Port Size: ø6 One-touch Fitting, S Kit: IO-Link - 32 Outputs - Connector M12, SI Unit Polarity: Negative Common, Option 1: DIN Rail, DIN Rail Length: 13 Stations (for 13 Stations; Longer Rail than Total Length of Specified Valve Stations), Option 2: N + S

Stations: 12 Stations, Port Size: ø1/4" One-touch Fitting, S Kit: EtherNet/IPâ„¢ - 32 Outputs - Connector M12, SI Unit Polarity: Negative Common, Option 1: DIN Rail, DIN Rail Length: 13 Stations (for 13 Stations; Longer Rail than Total Length of Specified Valve Stations), Option 2: Built-in Silencer, Direct Exhaust

Stations: 12 Stations, Port Size: ø1/4" One-touch Fitting, S Kit: DeviceNetâ„¢ - 32 Outputs - Connector M12, SI Unit Polarity: Positive Common, Option 1: DIN Rail, DIN Rail Length: 13 Stations (for 13 Stations; Longer Rail than Total Length of Specified Valve Stations), Option 2: -

The gasket part number for the VS7-6 and the VP7-6 is "AXT500-13," and the gasket part number for the VS7-8 and the VP7-8 is "AXT510-13." The VQ7-6 gasket part number is "VQ7060-13-4-1" and the VQ7-8 gasket part number is "VQ7080-13-4-1."

Compact Cylinder Series NCQ8

), 200 (2"), 400 (4") 037 (3/8"), 087 (7/8"), 175 (1-3/4"), 350 (3-1/2"), 025 (1/4"), 075 (3/4"), 150 (1-1/2"), 300 (3"), 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") Double acting Double rod 13 012 (1/8"), 062 (5/8"), 125 (1-1/4"), 025 (1/4"), 075 (3/4"), 150 (1-1/2"), 037 (3/8"), 087 (7/8"), 175 (1-3/4"), 050 (1/2"), 100 (1"), 200 (2") Single rod Single acting

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

Hydraulic Filters

Suction filter with case EM820-*1*2 EM530-*1*2 2 104 x l177 EM920-*1*2 EM630-*1*2 2 1/2 132 x l212 EM030-*1*2 EM730-*1*2 3 132 x l212 EM130-*1*2 EM830-*1*2 3 1/2, 4 155 x l193 EM220-*1*2 1/2, 3/4, 1 69 x l88 FHG (Refer to P. 11.) Suction guard EM320-*1*2 1 1/4, 1 1/2, 2 89 x l123 EM420-*1*2 2 1/2, 3 109 x l188 EM040-*1*2 3/8, 1/2 53.1 x l90 FH34 FH44 FH54 FH64 (Refer to P. 15.)

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

HEC_W-E

TABLE 2-1 DIVISION OF DANGER, WARNING, CAUTION, AND NOTE -2-2 TABLE 2-2 MEANING OF A SYMBOLS -2-2 TABLE 2-3 SAFETY INTERLOCK LIST(PART 1) -2-6 TABLE 2-4 SAFETY INTERLOCK LIST(PART 2) -2-6 TABLE 3-1 QUALITY STANDARD FOR WATER(TAP WATER) -3-4 TABLE 5-1 FUNCTION OF COMPONENTS -5-3 TABLE 6-1 SPECIFICATIONS OF HEC006 -6-1 TABLE 6-2 SPECIFICATIONS OF HEC012 -6-2 TABLE 8-1 AVAILABLE MODE IN LEVEL

3 Port Solenoid Valve/

Safety Standard ISO13849-1 Certied2 (Corresponding to Category 2 to 4) 3 Port Solenoid Valve/ Residual Pressure Release Valve with Detection of Main Valve Position 1 1. Refer to page 2 for compliant products. RoHS 2. Refer to page 2 for certified products.

3 Port Solenoid Valve/

Safety Standard ISO13849-1 Certified*2(Corresponding to Category 2 to 4) *1 3 Port Solenoid Valve/ Residual Pressure Release Valve with Detection of Main Valve Position *1. Refer to page 2 for compliant products. RoHS *2. Refer to page 2 for certified products.

Air Catch Sensor Series ISA

-6 Part no. 105 140 175 210 245 280 315 Description ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L R L R L R L R L R L R No.

HEC_001W-E

Table7-2 Available mode in Level 2 No.

Soft Start-up Valve

with Light -14- 2.

Modular Type Filter Regulator Series AW

AW20P-270AS AR20P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N Note) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N Note) Set nut Round 1.0MPa Note 2) Note 3) Pressure gauge Square embedded type Round 0.2MPa Note 3) Square embedded type N.O. N.C.