IC /C VBA Error indication Displayed on pressure indication LED Operating temperature range 0 to 50C VE Storage temperature range 20 to 60C Operating humidity range 0 to 85%R.H.
AS2052FS AS1002FS AS2002FS Inlet pressure: 0.5 MPa 500 Inlet pressure: 0.5 MPa 100 08, 09 Inlet pressure: 0.5 MPa 06, 07 01, 23, 03, 04, 06, 07 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] 200 400 06, 07 03, 04 300 50 100 200 100 0 0 5 10 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002FS AS4002FS Inlet pressure
0 CE2 Operating direction IN Operating direction OUT 2.0 2.0 Clean gas filter Operating direction IN Operating direction OUT 1 ML2B 60 Clean bench (Class 100) 40 Displacement waveform C J G5-S 0.1 Supply rate 28.3 l/min Exhausted by relief port Displacement waveform 20 20 20 sec. 20 sec. 0 CV 0 Laser dust monitor (intake rate 28.3 l/min) 0.01 0.01 0.1 1 10 Particle diameter (m) Time Time
BMG2-012 928 Parallel Type Wide Opening Air Gripper MHL2 1122Dimensions 1122MHL2-10D 2 x M4 x 0.7 thread depth 5 (Mounting thread) D C A B 2 x 4.5 through (Hole for mounting body) 9 +0.025 3H9 0 depth 3 34 When closed E When closed J 4 4 x M4 x 0.7 thread depth 8 (Mounting thread) K cross view (Closed) +0.025 3H9 0 depth 3 +0.043 18H9 0 depth 1.5 44 M5 x 0.8 (Finger opening port) Auto switch
to 60C (No freezing) Ambient and fluid temperature +8 0 +10 0 +8 0 +10 0 +8 0 +10 0 +8 0 +10 0 90, 180 90 , 100 180 , 190 90, 180 90 , 100 180 , 190 Note) Rotating angle 5 at each rotation end 5 at each rotation end Angle adjustment range Cylinder bore size 6 8 Port size M3 x 0.5 Note) If optimum accuracy of the (rotating) angle is required, select an actuator with external stopper.
(Panel adaptor A+Panel adaptor B) ZS-22-A Standard Specifications Positive pressure Item Vacuum 1OOkPa{1.02kgticm2} type 1MPa{IO.2kgl/cm1 ~pe Panel adaptor A Z$2201 Model ZSE4B ZSE4B I ZSE4B ISE4LB ISE4LB I ISE4LB ISE4B ISE4B ISE4B -0-25 -0 -26 -0 -65 -Ql-25 -0-26 -0-65 -0-25 -0-26 -0 -65 Switch Pressure 10 -101kPa 1 0 1OOkPa -0.1 1MPa Panel adaptor B ZS-22-02 ; display range {75 -760mmHgl
0 !1 !0 !1 !2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.
adjusting bolt RB 2015 with adjusting bolt RB 0806 with adjusting bolt RB 1412 with adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt Configuration and shock absorber Fine stroke adjustment range (mm) 0 to 5.6 0 to 6 0 to 11.5 0 to 12 0 to 16 0 to 20 0 to 25 Stroke adjustment range When
to 60C (No freezing) Ambient and fluid temperature +8 0 +10 0 +8 0 +10 0 +8 0 +10 0 +8 0 +10 0 90, 180 90 , 100 180 , 190 90, 180 90 , 100 180 , 190 Note) Rotating angle 5 at each rotation end 5 at each rotation end Angle adjustment range Cylinder bore size 6 8 Port size M3 x 0.5 Note) If optimum accuracy of the (rotating) angle is required, select an actuator with external stopper.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 196 100 196 Particle concentration (particles/cf) Pressure converter Regulator (IR2000) RHC 98 98 ITV (Electro-pneumatic regulator) 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0 0.1 0.2 0.3 0.4 MK(2) 0.5 0.6 0.7 Laser dust monitor 1 Head side supply pressure
6 e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !
0 100 300 400 200 500 0 0 100 300 400 200 500 Flow rate [L/min(ANR)] Flow rate [L/min (ANR)] IW215 Flow rate characteristics IW222 Flow rate characteristics Supply pressure: 0.7 MPa 0.5 0.45 0.4 0.35 0.3 0.25 0.2 0.15 0.1 0.05 0 0 100 300 400 200 600 500 Supply pressure: 0.5 MPa 0.25 0.2 Set pressure [MPa] Set pressure [MPa] 0.15 0.1 IP 0.05 IW IW 0 0 100 300 400 200 500 Flow rate [L/min(
Movement mode Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50
0.0 0 10 20 30 Flow rate (slpm, N2) 4.30 (109.2) 3.25 (82.6) Clearance For Panel Mounting KT12HF 2000 psig (13.8 MPa) Inlet pressure: 1000 psig (6.9 MPa) 11.0 1600 9.7 1400 Delivery pressure (MPa) Delivery pressure (psig) 8.3 1200 2.97 (75.4) 6.9 1000 800 5.5 2.22 (56.4) 600 4.1 0.28 (7.1) 400 2.8 200 1.4 0 0.0 0 10 20 30 40 50 Flow rate (slpm, N2) 2.80 (71.1) Viton is a registered trademark
10 11 12 0 0 5 6 7 8 0 1 2 3 4 0 2 4 6 8 1 3 5 7 9 10 12 14 11 13 15 16 0 2 1 3 4 5 6 7 8 9 Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] 6 AFF/AM/AMD Series Micro Mist Separator AMD Series Standard Specifications Model AMD70D AMD80D AMD90D Fluid Compressed air Operating pressure range [MPa] 0.1 to 1.0 Ambient and fluid temperatures [C] 5 to 60 (No
Symbol -X2172 With Boss in Head End 3 Z X2172 MKB Bore size Stroke Rotary direction Body option With boss in head end 2 Bore size 20 25 32 40 50 63 Ah9 13 15 21 28 35 35 0 0.043 0 0.043 Ah9 0 0.052 0 0.052 0 0.062 0 0.062 Symbol -X2177 The Dimension of Head End Flange is the Same as the Current MK and MK2 Series 4 Z X2177 MKG Bore size Stroke Rotary direction Body option The dimension of
6 e q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !
Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at
0 0.043 43 8 50 16 40 13 22 5 2 8 12 1.0 M5 1.1-10
0 !0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!