SMC Corporation of America
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12 V 5 V, 3-wire (NPN) IC circuit Relay, PLC Diagnostic indication (2-color indicator) 3-wire (PNP) 12 V Yes Grommet 24 V 2-wire 12 V 3-wire (NPN) 5 V, Water resistant (2-color indicator) IC circuit M9PAV1 M9PA1 3-wire (PNP) 12 V M9BAV1 M9BA1 2-wire 12 V P3DWA Magnetic field resistant (2-color indicator) 2-wire (Non-polar) A96 A93 A90 A96V A93V2 Yes Grommet 5 V IC circuit 3-wire

B K P C C C U K P O A A S H L to C U S O H L to B D !

Contents MHF2-12D MHF2-12D1 MHF2-12D2 Grease package part number Seal kit MHF12-PS MHF12-PS MHF12-PS 20, 21, 22 MHF2-D,D1 (12, 16, 20) GR-S-010 (10g) for guide MHF2-D2 (12) GR-L-005 (5g) for cylinder Contents MHF2-D2 (16, 20) Order No.

[March 2020] D: Contents revised in several places. [August 2021] E: Contents revised in several places.

System error (Er0, 4, 6, 8, 40) is displayed. (2) Check if the power supply voltage 6 is in the range 12 to 24 VDC 10%. (2) Supply power in the range "HHH" is 12 to 24 VDC 10%. displayed. (1) Reset applied flow to a (1) Check if the flow exceeds the level within the set flow range.

T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 12-5 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDF60/70/80/90 Series IDX-OM-W093 1 1.1 () 6.2 1.1.1 3 IDF60/70/80/90 Series 1-1 IDX-OM-W093 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDF60/70/80/90 Series 1-2 IDX-OM-W093 1.2.4 IDF60/70/80/90 Series 1-3 IDX-OM-W093 1.2.5 HFC 1-5 HFC 1 2 3 4GWP

However, please contact SMC for water resistant products of 12 and 16. *2: The D-P3DWA is mountable on bore size 25 to 100. *3:1 m type lead wire is only applicable to the D-A93. *: Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ *:Solid state auto switches marked with are produced upon receipt of order.

Check if there is a noise source nearby. (2) Check if the power supply voltage is in the range 12 to 30 VDC. (2) Supply power in the range 12 to 30 VDC. "HHH" is displayed. 6 (1) Reset applied pressure to a level within the set pressure range. (1) Check if the pressure exceeds the upper limit of the set pressure range. "LLL" is displayed.

-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal VY1700 1 VY1900 1 Input signal voltage (current) for starting the operation of a pilot valve VY1D0 (direct operated)

PA VNH 12(P1) 12(P1) Nozzle 2(A) 1(P) PAX Nozzle 1(P) 2(A) 3(B) Stop valve Tank Coolant pump PB Tank Coolant pump For reducing load to pump, coolant liquid is returned from B port to tank each time.

Escapements Series MIW/MIS 8, 12, 20, 25, 32 How to Order Finger options Nil: Basic type (Standard type) 1: Tapped on upper and lower faces 2: Tapped on all faces (5 surfaces including end surface) 12 12 1 A S D M9BW MIW Double finger type 32 50 1 A S D M9BW MIS Single finger type Made to Order For detailes, refer to page 1423.

.S 12 S IDU3E/4E/6E-10 12-1 IDU Series 12-1 12-1 IDX-OM-W014 12.S 12-2 L N PE M3 6.5mm 2 1.25mm 12-3 1-1 IDU Series 12-2 12-2 IDX-OM-W014 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W014 13 T 13-4 PE 1 2 3 LN PE PE: LN: M3 6.5mm 1.25mm 2 () () IDU Series 13-4 13 2 IDX-OM-W014 13 T 13-5 IDU3E/4E

Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR SIGNAL OUTPUT . 12-1 12.3 REMOTE OPERATION . 12-2 12.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 12-3 12.5 ELECTRIC CIRCUIT . 12-4 Chapter 13 Option V . 13-1 13.1 SAFETY INSTRUCTIONS FOR USE . 13-1 13.2 SPECIFICATIONS . 13-1 13.3 MAINTENANCE . 13-2 Chapter 14 Inspection record . 14-1 14.1 INSPECTION RECORD .

V300 24 V600 Max.30 V80 mA 1 V 2815 V 1 k 29420 mA 12 V300 24 V600 -40No.PF-OMO0007CN PF2A7--28--X560 PF2A7--68--X560 PF2A7--29--X560 PF2A7--69--X560 (15 V) (420 mA) 12 V 300 24 V 600 1 k 5F.S. 1 s A B 1 V 5 V 4 mA 20 mA 1 NL/min 10 NL/min PF2A710 3.5 CFM10 -2 35.0 CFM10 -2 5 NL/min 50 NL/min PF2A750 18 CFM10 -2 176 CFM10 -2 10 NL/min 100 NL/min PF2A711 3.5 CFM10 -1 35.5 CFM10

D: Contents revised in several places. E: Modified errors in text. F: Contents revised in several places.

Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP

Option Note 4) D Note 7) N.O. (Normally open) Drain port is open when pressure is not applied.