Series: 3 (VQZ300), Composite Symbol: 2 (Metal Seal N.O.), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: Y (DIN Terminal), Manual Override: Non-locking Push Style, IP65 Compliant: None, 1: 1, Port Size: 03T (Base Mounted w/Sub-plate NPTF3/8)

Series: 3 (VQZ300), Composite Symbol: 3 (Rubber Seal N.C.), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: YZ (DIN Terminal w/Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: None, 1: 1, Port Size: 03T (Base Mounted w/Sub-plate NPTF3/8)

Series: 3 (VQZ300), Composite Symbol: 1 (Metal Seal N.C.), Function: Standard (0.35W DC, AC), Coil Voltage: 3 (110VAC 50/60HZ), Lead Wire: YZ (DIN Terminal w/Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: None, 1: 1, Port Size: 03T (Base Mounted w/Sub-plate NPTF3/8)

Series: 3 (VQZ300), Composite Symbol: 3 (Rubber Seal N.C.), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: LO (L Plug w/o Connector), Manual Override: Non-locking Push Style, IP65 Compliant: None, 1: 1, Port Size: 03T (Base Mounted w/Sub-plate NPTF3/8), CE Compliant: Q (CE Marked)

Series: 3 (VQZ300), Composite Symbol: 1 (Metal Seal N.C.), Function: BR (B + R), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, IP65 Compliant: None, 1: 1, Port Size: 03T (Base Mounted w/Sub-plate NPTF3/8)

Series: 3 (VQZ300), Composite Symbol: 1 (Metal Seal N.C.), Function: BR (B + R), Coil Voltage: 5 (24VDC), Lead Wire: LO (L Plug w/o Connector), Manual Override: Non-locking Push Style, IP65 Compliant: None, 1: 1, Port Size: 03T (Base Mounted w/Sub-plate NPTF3/8)

Series: 3 (VQZ300), Composite Symbol: 3 (Rubber Seal N.C.), Function: Standard (0.35W DC, AC), Coil Voltage: 3 (110VAC 50/60HZ), Lead Wire: LO (L Plug w/o Connector), Manual Override: Non-locking Push Style, IP65 Compliant: None, 1: 1, Port Size: 03T (Base Mounted w/Sub-plate NPTF3/8)

Series: 3 (VQZ300), Composite Symbol: 3 (Rubber Seal N.C.), Function: Standard (0.35W DC, AC), Coil Voltage: 6 (12VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, IP65 Compliant: None, 1: 1, Port Size: 03T (Base Mounted w/Sub-plate NPTF3/8)

Series: 3 (VQZ300), Composite Symbol: 3 (Rubber Seal N.C.), Function: Standard (0.35W DC, AC), Coil Voltage: 6 (12VDC), Lead Wire: G (Grommet, w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, IP65 Compliant: None, 1: 1, Port Size: 03T (Base Mounted w/Sub-plate NPTF3/8)

SMCs 3 port air operated valve, VPA300/500/700 is available in body ported or base mounted styles.? The VPA offers a high flow capacity of?Cv1.0 (VPA300), Cv2.3 (VPA500), Cv4.0 (VPA700).? It is possible to use the?series?as either a?selector valve, or divider valve. The?VPA is changeable from a normally closed style to a normally open style., MANIFOLD BASE, VALVE, VP3/5/7 SOL VALVE 3-

Fluoropolymer Piping Equipment

8 30 26 18 36 41 78 74 49 Inch Size Model Applicable tubing O.D.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

25 41 49 36 42.5 8 30 26 36 78 74 18 44.5 46 Inch Size Applicable tubing O.D.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Applicable solenoid valve Refer to the p.1.2-41.

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

AC

Q R Model Port size A B C D M P N B B E F G H J K L 1/8, 1/4 1/4, 3/8 124.5 153 153 188 3.3 4.3 0.8 0.8 80 80 80 105 140 181 181 238 38 38 38 41 40 48 53 70 147.5 56.8 60.8 60.8 65.5 30 41 41 50 50 64 64 84 24 35 35 40 5.5 7 7 9 8.5 11 11 13 5 7 7 7 22 34.2 34.2 42.2 50 70.5 70.5 88 23 26 26 33 AC2001 AC2501 AC3001 AC4001 194 194 229 1/4, 3/8 1/4, 3/8, 1/2 Option marks in the dimension diagram

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

45 45 50 37 41 41 45 13 17 17 22 26 32 32 41 26 26 26 31 5 6 6 8 8 8 8 10 134 138 140 174 M8 x 1.25 M20 x 1.5 M10 x 1.25 M26 x 1.5 M10 x 1.25 M26 x 1.5 M32 x 2 M14 x 1.5 The bracket is shipped together.

25

IZS 41 IZS 42 IZF Sensor not connected Offset voltage (V) 30 Total number of ionizers that may be connected IZS41: Max. 8 units. IZS42: Max. 5 units.

VQ5000

R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 7 Base Mounted Series VQ5000 Plug-in/Plug Lead: Single Unit Plug Lead Type Grommet 2 position single: VQ5150 1-G H 194.5 121.3 73.2 194.5 121.3 73.2 53 59.5 59.5 27.5

Plug-in/Plug Lead: Single Unit

R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 Series VQ5000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 5 1 08 03 F U1 Option Option None Exhaust cleaner for Rc 1: D side exhaust Exhaust cleaner for Rc