SQ1000/2000

A Black Red Station 1: 1 Station 1 Station 1: 2 1 2 3 4 Double wiring White SOL. B Red COM. Black SOL. A 1 COM SOL. A Station 1: 3 Black Red Station 2 Black Red White Unused Station 1: 4 COM SOL. A Station 2: 1 Black Red Stations for all double wiring Station 3 Station 2: 2 COM SOL. A A B Black Red White Station 2: 3 1 2 3 4 5 6 7 8 9 10 Station 4 Station 2: 4 2 3 4 5 6 7 8 9 10 SOL.

CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 19 13 73.5 8 9 10 57.5 6 3.5 8 Up to 300 55 80 8 20 18 15.5 20 13 38 19 13 83.5 10 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 25 22 45 19 13 83.5 12 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 32 22 45 30 16 90.5 14 15 10 76 11 4 8 Up to 300 70 21 100.5 32 11 22 40 24 52 H GQ GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 28

NCA1

/16 1 3/16 1 7/16 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 3/8 1.26 1.1 5 1 1.71 2.36 3 5/8 6 5 5/8 6 1/16 200 (2) 5/8 7/16-20 3/4 2.6 3/8 2 11/16 1 7/16 1 9/16 1/8 1 1/8 3/8 9/16 5/16-24 2.5 0.3 3/8 3/8 1.26 1.06 5 1 1.71 2.4 3 5/8 6 5 5/8 6 3/16 250 (2.5) 5/8 7/16-20 3/4 3.1 3/8 3 1/8 1 5/8 1 9/16 1/8 1 1/8 3/8 9/16 5/16-24 3 0 3/8 3/8 1.3 1.06 5 1/8 1 1.75 2.48 3 3/46 1/8 5 3/4 6 5/16 325 (

Hydraulic

32 31 f8 to 800 24 50 22 38 16 19 7 9 55 33 72 12 8 53 8 9 40 7.5 M14 x 1.5 13 36 21 40 34 f8 to 800 24 60 24 41 18 21 9 9 66 36 84 14 11 54 10 11 48 7.5 M16 x 1.5 19 44 21 (mm) Bore size (mm) P NB NC NN S ZZ 20 19 15 M22 x 1.5 1/8 81 138 25 19 15 M24 x 1.5 1/8 81 143 32 M30 x 1.5 19 15 1/8 87 159 40 1/4 M33 x 2 24 21 108 183 50 Series CHM Dimensions Rear flange type: CHMG GA N Rc P 2-NN

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Data BQ-1 BQ-2 12 to 25 32 to 63 1.5 1.5 For the auto switch weight, refer to page 7-9-1.

5 Port Solenoid Valve

Nil None 1 1 station 9 9 stations Note 1) Without SI Unit, the symbol is nil.

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

HRX-OM-X071

9.1 Specifications . 9-1 9.1.1 HRR050-A-. 9-1 9.1.2 HRR050-W-. 9-3 9.1.3 Refrigerant with GWP reference . 9-5 9.1.4 Communication specification . 9-5 9.2 Outline dimensions . 9-6 9.2.1 HRR050-A-20. 9-6 9.2.2 HRR050-W-20. 9-7 9.2.3 HRR050-A-40. 9-8 9.2.4 HRR050-W-40. 9-9 9.3 Flow Chart . 9-10 9.3.1 HRR050-A-20/40.9-10 HRR Series HRX-OM-X071 Contents 9.3.2 HRR050-W-20/40. 9-10 9.4 Cooling capacity

ZP

Series ZP2 CAT.ES100-76A Vacuum Pad Series ZP2/ZP Vacuum Pad Series ZP2/ZP Pad Diameter List : Series ZP2 : Series ZP Page of ZP2 Pad type Symbol 14 0.8 1.1 2 3 3.5 4 5 6 7 8 9 10 11 13 Note) U P. 1 MU P. 2 Flat EU P. 5 AU P. 8 C Flat with rib P. 1 P. 1 P. 10 UT Thin flat (pad) CT Thin flat with rib Note) Note) B P. 1 J P. 13 Bellows (pad) MB P. 14 ZJ P. 16 D Deep AN Nozzle pad P. 9 MT

5

CX CZ D E F FL G H H1 I K KA L MM NA NN P RR S U (Z) (ZZ) 20 18 15.5 13 9 24 25 10 19 8 20 0 0.033 13 10.5 8 41 5 28 5 6 30 M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 D32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 64

Table of Contents

0" #1 ( 2 3 " " " 1 (N.O.) Manifold Specifications 4 " 4 " $! 5"5 6"( % " 7 1 ' % 8 6 4 # " 5 " " 0 5 9 9 ' 9 ' * 9 $ # " 5 Indivisual SUP type (N.C.)

Auto Switch Guide

Indication Type P. 7-9-30 Band, Rail, Tie-rod, Direct Mounting With Timer P. 7-9-33 Band, Rail, Tie-rod, Direct Mounting Magnetic Field Resistant 2-color Indication Type P. 7-9-34 Rail Mounting Heat Resistant 2-color Indication Type P. 7-9-35 Rail Mounting Made to Order Specifications P. 7-9-36 Technical Data 1, 2 P. 7-9-39 7-9-1 2 SMC Auto Switch Variations Function Type Electrical

Magnetically Coupled Rodless Cylinder

9 #8!0!2!6 @4 @1 @8 $0 #9 #3 @2 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 #0 @7 #1 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 10 Component Parts Material No. Description Note No.

Free Mount Cylinder

9, @0, @1. Seal kit includes !9, @0, @1.

1

1, !6, !7, !8, !9, @0, @1, @2, @3, @6, @9, #0, #1, #3, #4, #5, #6, #7 20, 25, 32, 40, 50 !9 is type L only. -XC6A r, !0, !5, !6, !7, !8, !9, @0, @1, @3, @4, @7, @8, @9, #1, #2, #3, #4, #5, #9, $0 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. Dr, !1, !7, @0, @1, @2, @3, #1, #5 CQ2 20, 25, 32, 40, 50 #1 is rod side only.

Swivels

PS121JM10-12-12 3.39 2.16 1.38 1.69 1-3/16-12 1-1/16-12 86.2 mm 55.0 mm 35.0 mm 42.9 mm UN-2A UN-2B PS161JM10-16-16 3.52 2.26 1.62 1.88 1-7/16-12 1-5/16-12 89.4 mm 57.4 mm 41.3 mm 47.6 mm UN-2A UN-2B O-Ring Face Seal O-Ring Face Seal Part Number A B Hex 1 Hex 2 Port 1 Port 2 A PS41JMJM-4-4 2.85 1.97 .75 1.19 9/16-18 9/16-18 72.3 mm 50.0 mm 19.0 mm 30.2 mm UNF-2A UNF-2A B Hex 2 Hex 1 PS61JMJM

Air Cylinder

1.1 3/4 3/8 2.02 0.3 3/8 1 1/8 1 1 1/4 7/16-20 9/16 1 1/8 5 5/8 6 2 3/16 150 (1.5") 1 1.71 2 2.36 6 1/16 3/8 3 5/8 7/16 5/8 1/8 1.26 5/16-24 3/8 1 7/16 1.84 1.06 3/4 3/8 2.6 0.3 3/8 1 1/8 1 1 3/4 7/16-20 9/16 1 1/8 5 5/8 6 2 11/16 200 (2") 1.71 1 2 1/2 2.4 6 3/16 3/8 3 5/8 9/16 5/8 1/8 1.3 5/16-24 3/8 1 5/8 1.06 2.19 3/4 3/8 3.1 0 1 1/8 3/8 1 2 1/4 7/16-20 9/16 1 1/8 6 1/8 5 3/4 3 1/8 250

Electric Actuators

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

HRX-OM-R026

winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Drain of the circulating fluid . 8-7 8.4.2 Drain of the facility water . 8-9 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRSH090-A-20. 9-1 9.1.2 HRSH090-A-40. 9-2 9.1.3 HRSH090-W-20. 9-3 9.1.4 HRSH090-W-40. 9-4 9.1.5 Refrigerant with GWP reference . 9-5 9.1.6 Communication specification . 9-6 9.2

MY1

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !